资源

https://si.ldyycf.xyz/?p=33 https://web.stanford.edu/class/ee328/swb/ 论坛 https://bbs.eetop.cn/ https://bbs.eetop.cn/thread-265421-1-1.html https://bbs.21ic.com/ 课程 https://inst.eecs.berkeley.edu/~ee130/fa13/project/ http://www.micro.deis.unibo.it/~rudan/MATERIALE_DIDATTICO/diapositive/TCAD/

安装

https://zhuanlan.zhihu.com/p/28517634 https://zhuanlan.zhihu.com/p/29150773 最简单的方法是找到已经安装好的虚拟机。

快速纵观入门理解

知乎懒小木live https://www.zhihu.com/lives/923576641542848512

模块了解

MOOC半导体器件原理与模拟设计课程 https://www.icourse163.org/course/ECNU-1003476011?tid=1206787208

例如Sentaurus Process的了解。 可直接跳： 4.4.1 npn晶体管的一维Sentaurus Process介绍建模过程 使用文件夹terminal方式运行

sprocess 1D_npn_fps.cmd 

之后可以用inspect查看plx曲线。

1D_npn_fps.cmd 如下：

#decleare  line x location=4.0<um> tag=SubTop spacing= 20.0<nm> line x location=4.5<um> spacing= 40.0<nm> line x location=6.0<um> tag=SubBottom spacing= 0.2<um> region Silicon xlo=SubTop xhi=SubBottom init concentration=1e 15<cm-3> field=Boron mgoals normal.growth.ratio=1.1 min.normal.size=20<nm> max.lateral.size=0.2<um>  # Buried layer (deposit screen ox, implant) deposit Oxide type=isotropic thickness=25.0<nm> implant Antimony dose=1.5e15<cm-2> energy=100.0<keV> tilt=0 rotation=0 SetPlxList {BTotal Antimony_Implant} WritePlx n@node@_Sbasimp.plx # Partial drive-in  diffuse temperature=1100<C> time=1<hr> strip Oxide SetPlxList {BTotal SbTotal} WritePlx n@node@_Sbdrive.plx  # Create Epi layer deposit material=Silicon type=isotropic rate=1.0<um/min> time=4.0<min> species=Arsenic concentration=1e15<cm-3> diffuse temperature=1100<C> time=1<hr> SetPlxList {BTotal SbTotal AsTotal} WritePlx n@node@_Epi.plx # Base screen oxide, implant and drive-in deposit Oxide isotropic thickness=25.0<nm> implant Boron dose=1e14<cm-2> energy=50<keV> tilt=7<degree> rotation=0 diffuse temperature=1000<C> time=50<min>  # Emitter screen oxide, implant and activation implant Arsenic dose=2e15<cm-2> energy=55<keV> tilt=7<degree> rotation=0 diffuse temperature=1000<C> time=35<min> # Show the final profiles SetPlxList {BActive SbActive AsActive} WritePlx n@node@_Final.plx  exit  

官方教程

用terminal方式 which swb安装路径可见。 教程地址： /usr/synopsys/sentaurus/O_2018.06-SP2/tcad/O-2018.06-SP2/manuals

/usr/synopsys/sentaurus/O_2018.06-SP2/tcad/O-2018.06-SP2/Sentaurus_Training

或者下载: https://si.ldyycf.xyz/?p=33

工艺仿真user guide https://usermanual.wiki/Document/SentaurusSProcessUserGuide.519283346/view