1）网格设置 2)区域、电极和接触金属设置 3)计算模型和方法 4）求解 5）结果展示 6)高度变化的循环

#change GT size and CF trend go internal set length0 = 1  set height = 0.5  #height change from 0.5-0.75 set index = 0 loop steps = 5   go atlas   #mesh mesh width=100 x.m l=0.0 s=0.25 x.m l=1 s=0.25 x.m l=1.5 s=0.25   x.m l=2.5 s=0.15 x.m l=3 s=0.15 x.m l=4 s=0.15 x.m l=6.5 s=0.25 x.m l=7.5  s=0.25  y.m l=-1 s=0.05 y.m l=-0.5 s=0.01 y.m l=-0.1 s=0.01 y.m l=0.1 s=0.01 y.m l=0.12 s=0.01 y.m l=0.13 s=0.05 y.m l=0.3 s=0.2 y.m l=0.8 s=1 y.m l=1.12 s=2 #region/elec/contact region num=2 x.min=0 x.max=7.5 y.min=-1 y.max=0.1 mat=nitride insulator region num=1 x.min=0 x.max=7.5 y.min=0.1 y.max=0.12 mat=AlGaN x.comp=0.25 region num=3 x.min=0 x.max=7.5 y.min=0.12 y.max=1.12 mat=GaN substrate elec num=1 name=source x.min=0 x.max=1 y.min=0.1 y.max=0.13 elec num=2 name=drain x.min=6.5 x.max=7.5 y.min=0.1 y.max=0.13 elec num=3 name=gate x.min=2.5 x.max=3 y.min=0.0 y.max=0.1 elec num=4 name=gate x.min=2 x.max=3.5 y.min=-$height y.max=0.0 elec num=5 substrate contact name=gate work=5 contact name=source work=3.93 contact name=drain work=3.93 #method & model models print srh mobility albrct.n model polarization calc.strain polar.scale=0.65 output con.band val.band charge polar.charge band.par method newton trap #solve solve solve init save outf=GTheight_0.7.str solve init solve vdrain=12 vgate=0.5 log outf=GTheight_$'height'.log solve vbase=0.7 ac freq=1e9 fstep=1e9 nfsteps=10 #end loop go internal set height=$height +0.05 set index = $index + 1 l.end #tonyplot tonyplot -overlay GTheight_0.5.log GTheight_0.55.log GTheight_0.6.log GTheight_0.65.log GTheight_0.7.log -set s1.set tonyplot GTheight_0.7.str -set s2.set quit 

• 仿真出的器件结构
• Cgs结果：随着height高度增加，Cgs变大。

上面就是简单的仿真情况，希望对后面学习Silvaco的同学有所帮助。其他还有一些对例子的学习注释但不知道以怎么样的形式发出来比较好。